All Fluorine Filter Cartridge for SEMI Wet Process
Request a QuoteDescription
Membrane Solutions Wet-Fluoride series filters are All-PTFE structure. The filters use high flow rate PTFE membranes. This kind of filters is especially designed for chemicals including SC1, SC2, 49HF, HNO3, EKC and NMP in SEMI-WEC application. Excellent filter design could ensure low pressure drop across the filter and good particle removal performance. The fluoropolymer material possesses low concentration of extractables and other contaminants that may be deterimental to the proceess, and provides high retention performance in the application at the same time.
Features
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Excellent flow performance and longer lifetime
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Excellent chemical and temperature resistance
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All fluoropolymer construction and very low extractables
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Pre-wet option for convenience
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100% Integrity tested
Specifications
Materials | Membrane |
PTFE |
Support,Core and Cage | PFA | |
Cartridge O-ring | TFV/FFKM | |
Disposable Shell | PFA | |
Removal Rating | 10nm,20nm,30nm,50nm,0.1μm,0.2μm | |
Max.Operating Conditions |
Max.Forward Differential Pressure | 0.5 MPa(72 psi)@25℃(77 °F) 0.2 MPa (29 psi)@100℃(212 F) |
Max.Reverse Differential Pressu | 0.35 MPa (50 psi)@25℃(77 °F) | |
Max.Operating Temperature | Cartridge 100℃(212F); Disposable 180℃(356°F) |
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Package | Dry; Prewet by UPW |