All Fluorine Filter Cartridge for SEMI Wet Process

Request a Quote

Description

Membrane Solutions Wet-Fluoride series filters are All-PTFE structure. The filters use high flow rate PTFE membranes. This kind of filters is especially designed for chemicals including SC1, SC2, 49HF, HNO3, EKC and NMP in SEMI-WEC application. Excellent filter design could ensure low pressure drop across the filter and good particle removal performance. The fluoropolymer material possesses low concentration of extractables and other contaminants that may be deterimental to the proceess, and provides high retention performance in the application at the same time.

Features

  • Excellent flow performance and longer lifetime

  • Excellent chemical and temperature resistance

  • All fluoropolymer construction and very low extractables

  • Pre-wet option for convenience

  • 100% Integrity tested

Specifications

Materials
Membrane
 PTFE
Support,Core and Cage  PFA
Cartridge O-ring  TFV/FFKM
Disposable Shell  PFA
Removal Rating 10nm,20nm,30nm,50nm,0.1μm,0.2μm
 Max.Operating
  Conditions
Max.Forward Differential Pressure  0.5 MPa(72 psi)@25℃(77 °F)
 0.2 MPa (29 psi)@100℃(212 F)
Max.Reverse Differential Pressu  0.35 MPa (50 psi)@25℃(77 °F)
Max.Operating Temperature  Cartridge 100℃(212F);

 Disposable 180℃(356°F)
Package Dry;    Prewet by UPW

Dimensions

Flow Rate Vs. Differential Pressure Performance

Ordering Information 

Related Products