DP Series Stainless Steel Gas Filter
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The DP series stainless steel gasket-type gas filter cartridges are compactly designed, making them ideal for gas distribution systems in semiconductor processes. Featuring a 316 stainless steel housing and a core made of high-strength metal sintered elements with uniform porosity, they are well-suited for filtering large particles in high-temperature environments of up to 400°C. With a variety of connector options, they can easily adapt to different standard piping systems.
Features
- 316L stainless steel housing with a sintered core, resistant to various high-temperature environments.
- Multiple adaptor options available, including 1/4", 1/2", and 3/8".
- Manufactured in a cleanroom environment to ensure low extractables.
Specification
| Materials | Filter Element | 316SS |
| Gasket | 316LSS | |
| Support | 316SS | |
| Removal Rating | 0.3μm | |
| Filtration efficiency | ≥95%@0.3μm | |
| Adaptor | 1/4、3/8、1/2 | |
| Recommended workflow | 1/2、3/8 type：0-200slpm | |
| Helium Leak Test | Design Verification | 2×10-10atm.cm³/sec |
| Process verification | 1×10-8atm.cm³/sec | |
| Operating conditions | Maximum operating pressure | 20.7MPa@25℃ |
| Maximum working differential pressure | 2.5MPa@25℃ | |
| Maximum working reverse pressure difference | 1.0MPa@25℃ | |
| Maximum operating temperature | 450℃ | |
Dimensions
Flow Characteristics
Ordering Information
| Product | Skeletons | Removal Rating | Outer Diameter | Adaptor | Length | |||
| Type | Inlet | Outlet | Size | |||||
| CRDP | L=316 | 030=0.3um | D=4mm P=6mm |
V=VCR | M=Male F=Female |
M=Male F=Female |
4=1/4 6=3/8 8=1/2 |
25=25 30=30 |
