CMPro-L Series Polypropyene Membrane Winded Depth Filter
Request a QuoteProduct Description
CMPro-L series of deep filter cartridges are made of a composite structure of polypropylene filter media, prepared for the filtration of CMP slurry delivery systems (SDS). Its unique gradient design makes it well suited to meet the challenges of chemical mechanical polishing (CMP) slurry filtration. The tapered pore structure gives CMPro-L a good balance between excellent particle interception efficiency and high dirt-holding capacity. It effectively removes damaging large particles from CMP slurry and maintains the same effective particle size distribution (PSD) before and after filtrarion. CMPro-L can meet a wide range of different CMP application scenarios, including oxide CMP, shallow trench segregation CMP and metal wiring CMP.
Feature
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Gradient filtration structure
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The sharp efficiency curve significantly increases the removal rate of oversized particles while minimizing the removal of effective particles
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Optimize service life
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No surfactants and binders are added to reduce precipitation
Specifications
| Materials | Filter Layers/Support | Polypropylene |
| Core/End Cap | Polypropylene | |
| O-ring | EPDM | |
| Removal Rating | 0.05μm, 0.07μm, 0.1μm, 0.2μm, 0.5μm, 1.0μm, 3.0μm, 5.0μm, 10μm | |
| Dimensions | Outer Diameter | 68mm |
| Lengths | 5inch, 10inch, 20inch | |
| Max. Operating Conditions |
Max. Forward Differential Pressure | 0.52 MPa (75 psi) @ 25 ˚C (77 ˚F) |
| 0.19 MPa (27 psi) @ 82 ˚C (179 ˚F) | ||
| Max. Operating Temperature | 80 ˚C (176 ˚F) | |
Dimensions
Flow Rate VS. Differential Pressure Performance
Ordering Information
