CMPro-L Series Polypropyene Membrane Winded Depth Filter

CMPro-L is prepared from a composite polypropylene filter for the filtration of CMP slurry delivery System(SDS).The conical hole structure enables CMPro-L to achieve a good balance between excellent particle interception efficiency and high contaminant absorption.It effectively removes damaging large particles from CMP slurry and maintains the effective particle size distribution(PSD)of slurry before and after filtration.CMPro-L can meet a variety of different CMP application scenarios including oxide CMP,shallow trench isolation CMP and metal wiring CMP.
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Datesheet CMPro-L Series

Features

  • Gradient filtration structure
  • The sharp efficiency curve significantly increases the removal rate of oversized particles while minimizing the removal of effective particles
  • Optimize service life
  • No surfactants and binders are added to reduce precipitation

Applications

  • Filtration of CMP slurry in CMP slurry delivery systems (SDS).
  • Removal of damaging large particles from CMP slurry while maintaining the effective particle size distribution (PSD) of the slurry.
  • Filtration for various CMP application scenarios, including oxide CMP, shallow trench isolation CMP, and metal wiring CMP.

Technical Parameters

Materials Filter Layers/Support Polypropylene
Core/End Cap Polypropylene
O-ring EPDM
Removal Rating 0.05μm,0.07μm,0.1μm,0.2μm,0.5μm,1.0μm,3.0μm,5.0μm,7.0μm,9.0μm,10.0μm,100.0μm
Dimensions Outer Diameter 68mm
Lengths 10inch,20inch
Max.Operating
Conditions		 Max.Forward Differential Pressure 0.52 MPa(75 psi)@25℃(77 °F)
0.19 MPa(27 psi)@82℃(179°F)
Max.Operating Temperature 80℃(176°F)

FAQ

 

 

Filtration Requirements and Solutions for CMP Polishing Slurry