Max Series PFA Stainless Steel Gas Filter

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Product Description

The stainless steel Max series is designed for ultra-high purity and high flow gas filtration, with a flow range of 0-1000slpm and a filtration accuracy of 0.003μm. Internally, it adopts a perfluorinated filter element with excellent chemical compatibility, which can be used for filtering gases in all semiconductor processes.

Features

  • 316L electrolytic polishing shellm perfluorinated inner core, high cleanliness, low precipitation

  • 100% integrity and helium leak detection

  • Large size, high flow rate

Specification Parammeters

Material


Membrane

Hydrophobic PTFE

Core

 PFA

O-ring

FEP Encapsulated FKM

Housing

electrolytic polishing 316L EP

Internal Surface
Treatment

Roughness

 ≤0.13μm

Surface Chemistry

 Cr Fe>1

Removal Rating

≥0.003μm

 

Particle
Retention efficiency

>99.9999999@MPPS

Adaptor Type

1/4,1/2 VCR 1/4,3/8,1/2 SWG

Helium
leak testing

Design Verification

 2×10-11atm.cm3/sec

Process Verification

 1×10-9atm.cm3/sec

Operating
Conditions

Max.Operating Pressure

 7MPa@121℃

Max.Forward
Operating Differancial Pressure

 0.6MPa@23℃

Max.Reverse
Operating Differancial Pressure

 0.3MPa@23℃

Max.Operating Temperature


 120℃

Recommended
work  flow

0-1000slpm
 

Structure Diagram