Mid Series PFA Stainless Steel Gas Filter
Request a QuoteProduct Description
The stainless steel Mid series is designed for ultra-high purity gases, with a double-layer PTFE membrane and a filtration accuracy of 0.003μm. Internally equipped with perfluorinated filter elements, it has excellent chemical compatibility and can be used for filtering gases in various semiconductor processes.
Features
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316L electrolytic polishing shell, perfluorinated inner core, high cleanliness, low precipitation
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100% integrity and helium leak detection
Specification Parameters
|
Material |
Membrane |
Hydrophobic PTFE |
|
Core |
PFA |
|
|
O-ring |
FFKM |
|
|
Housing |
eletrolytic polishing 316L/316L VAR |
|
|
Internal Surface |
Roughness |
≤0.13μm |
|
Surface Chemistry |
316:Cr Fe>1 |
|
|
316VAR:Cr Fe>1.5 |
||
|
Removal Rating |
≥0.003μm |
|
|
Particle |
>99.9999999(9LRV)@MPPS |
|
|
Recommended |
0-120slpm |
|
|
Adaptor Type |
1/4,1/2 VCR;1/4,3/8 SWG |
|
|
Helium |
Design Verification |
2×10-¹¹atm.cm³/sec |
|
Process Verification |
1×10-9atm.cm³/sec |
|
|
Operating |
Max.Operating Pressure |
20.7MPa@121℃ |
|
Max.Forward |
0.4MPa@23℃ |
|
|
Max.Reverse |
0.07MPa@23℃ |
|
|
Max.Operating Temperature |
120℃ |
|
|
Downstream |
Particles |
<0.03ea/L(Particles>0.01μm) |
|
Volatiles |
<10ppb |
|
Structure Diagram