Mid Series PFA Stainless Steel Gas Filter
The stainless steel Mid series is designed for ultra-high purity gases, with a double-layer PTFE membrane and a filtration accuracy of 0.003um.Internally equipped with perfluorinated filter elements, it has excellent chemical compatibility and can be used for filtering gases in various semiconductor processes.
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Related Documents
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| Datesheet Stainless Steel Mid Series Gas Filter |
Features
- 316Lelectrolyticpolishing shell,perfluorinated inner core, high cleanliness, low precipitation
- 100%integrity and helium leak detection
Applications
Technical Parameters
| Material | Filter Membrane | Hydrophobic PTFE | |||
| Core | PFA | ||||
| O-ring | FFKM | ||||
| Housing | Electrolytic Polishing 316L/316L VAR | ||||
| Roughness | ≤0.13μm | ||||
| Internal SurfaceTreatment | Surface Chemistry | 316 Housing:cr Fe>1 | |||
| 316VAR Housing:crFe>1.5 | |||||
| Removal Rating | ≥0.003μm | ||||
| Particle Retention Efficiency | >99.9999999(9LRV)@MPPS | ||||
| Recommended Operating Flow Rate | 0-120slpm | ||||
| Adaptor | 1/4,1/2VCR;1/4,3/8 SWG | ||||
| Helium Leak Testing | Design Verification | 2×10¹¹atm.cm³/sec | |||
| Process Verification | 1×10⁹atm.cm³/sec | ||||
| Operating Conditions | Maximum Operating Pressure | 20.7MPa@121℃ | |||
| Maximum Operating Forward Differential Pressure | 0.4MPa@23℃ | ||||
| Maximum Operating Reverse Differential Pressure | 0.07MPa@23℃ | ||||
| Maximum Operating Temperature | 120℃ | ||||
| Downstream Cleanliness | Particles | <0.03ea/L(for particles>0.01μm) | |||
| Volatiles | <10ppb | ||||
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