Clean-Gard Series PES Pleated Filter Cartridge with PP Cage for SEMI Clean Process
Request a Quote| Item No | Product Name | Description | |
|---|---|---|---|
| CGCBSXN04TRD | Clean-Gard PES Cartridge Filter | Pore Size: 0.1μm, Length: 4", OD: 68mm, Adapter: 222/Flat, O-ring: TEV, Package: Dry | Request a Quote |
| CGCBSXN10TRD | Clean-Gard PES Cartridge Filter | Pore Size: 0.1μm, Length: 10", OD: 68mm, Adapter: 222/Flat, O-ring: TEV, Package: Dry | Request a Quote |
| CGCCSXN10TED | Clean-Gard PES Cartridge Filter | Pore Size: 30nm, Length: 10inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: TEV, Package: Dry | Request a Quote |
| CGCGMXN10PRD | Clean-Gard PES Cartridge Filter | Pore Size: 0.05μm, Length: 10inch, OD: 83mm, Adapter Type: 222/Flat, Sealing: TEV, Package: Dry | Request a Quote |
| CGCGSXN10TED | Clean-Gard PES Cartridge Filter | Pore Size: 0.05μm, Length: 10inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: TEV, Package: Dry | Request a Quote |
| CGCGSXN20TRD | Clean-Gard PES Cartridge Filter | Pore Size: 0.05μm, Length: 20inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: TEV, Package: Dry | Request a Quote |
| CGCGSXN40TRD | Clean-Gard PES Cartridge Filter | Pore Size: 0.05μm, Length: 40, OD: 68mm, Adapter Type: 222/Flat, Sealing: TEV, Package: Dry | Request a Quote |
Description
Membrane Solutions Clean-Gard series filters are used for dilute acids and bases and other process chemicals as a cost-effective alternative for wet etch and clean applications.The PES membrane provides significant characteristics including high flow rates, high dirt holding capacity and longer filter lifetime. In addition, the membrane structure reduces bubbles formation during flow.
Features
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Very high flow rates and longer service life
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Low extractables
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Reduces equipment pre-operation time
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Manufactured in cleanroom
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100% Integrity tested
Technical Parameters
|
Materials |
Membrane |
PES |
|
Support, Core and Cage |
PP |
|
|
O-ring（222） |
EPDM/TEV |
|
|
Removal Rating |
10nm, 20nm, 30nm, 50nm, 0.1μm |
|
|
Membrane Area |
SX (φ68mm) |
0.8 m2 /10” |
|
MX (φ81mm) |
1.2 m2 /10” |
|
|
MY (φ81mm) |
1.8 m2 /10” |
|
|
Max. Operating Conditions |
Max. Forward Differential Pressure |
0.5 MPa (72 psi) @ 25 ℃(77 °F) 0.25 MPa (36 psi) @ 70 ℃(158 °F) |
|
Max. Reverse Differential Pressure |
0.3 MPa (43 psi) @ 25 ℃(77 °F) |
|
|
Max. Operating Temperature |
70 ℃ (158 °F) ； |
|
|
Package |
Dry；Prewet by UPW |
|
Flow Rate VS. Differential Pressure Performance
Dimensions
Ordering Information
|
CGC |
Removal Ratings |
Diameter |
End Cap |
Length |
O-ring |
Metal Cleanliness |
Package |
|
E (10nm) A (20nm) C (30nm) G (50nm) B (0.1μm) |
SX (φ68mm,0.8m2 ) MX(φ81mm,1.2m2 ) MY(φ81mm,1.8m2 ) |
N(222 Flat) |
04 (4”) 10 (10”) 20 (20”) |
P (EPDM) T (TEV) |
R（＜25ug/device） E（Electronic） |
D (Dry) W (UPW Prewet) |
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