Clean-Nova Series PES Pleated Filter Cartridge with HDPE Cage for SEMI Clean Process
Request a QuoteDescription
Membrane Solutions Clean-Nova series filters are high flow rate, longer lifetime product which especially designed for filtration of weak acids, bases and ultra-pure DI water for the electronics industry.When operated at ambient temperature, the PES filter is compatible with a wide range of wet etch & clean solutions.
Features
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Excellent flow performance and longer service life
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Reduce equipment pre-operation time
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Excellent retention rate performance
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Very low metal extractables
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100% Integrity tested
Technical Parameters
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Materials |
Membrane |
PTFE |
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Support, Core and Cage |
HDPE |
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O-ring（222） |
Cartridge |
EPDM/TEV |
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Shell |
Disposable |
PFA |
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Removal Rating |
5nm, 10nm, 20nm, 30nm, 50nm, 0.1μm |
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Membrane Area |
SX (φ68mm) |
0.8 m2 /10” |
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MX (φ81mm) |
1.2 m2 /10” |
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MY (φ81mm) |
1.8 m2 /10” |
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Max. Operating Conditions |
Max. Forward Differential Pressure |
0.34 MPa (49 psi) @ 25 ℃(77 °F) 0.3 MPa (43 psi) @ 40 ℃(104 °F) |
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Max. Reverse Differential Pressure |
0.3 MPa (43 psi) @ 25 ℃(77 °F) |
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Max. Operating Temperature |
40 ℃ (104 °F) ； |
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Package |
Dry；Prewet by UPW |
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Flow Rate VS. Differential Pressure Performance
Dimensions
Ordering Information
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CNC |
Removal Ratings |
Diameter |
End Cap |
Length |
O-ring |
Metal Cleanliness |
Package |
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F (5nm) E (10nm) A (20nm) C (30nm) G (50nm) B (0.1μm) |
SX (φ68mm,0.8m2 ) MX(φ81mm,1.2m2 ) MY(φ81mm,1.8m2 ) |
N(222 Flat) |
04 (4”) 10 (10”) 20 (20”) |
P (EPDM) T (TEV) |
U（＜3ug/device） Q（＜10ug/device） R（＜25ug/device） |
D (Dry) W (UPW Prewet) |
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