CMPro-D Series High Precision PP Melt Blown Depth Filter Cartridge for CMP

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Item No Product Name Description
CMPD001NS10PED CMPro-D PP Depth Cartridge Filter Pore Size:0.10μm, lengh:10inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPD001NS20PED CMPro-D PP Depth Cartridge Filter Pore Size:0.10μm, lengh:20inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPD002NS10PED CMPro-D PP Depth Cartridge Filter Pore Size:0.20μm, lengh:10inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPD002NS20PED CMPro-D PP Depth Cartridge Filter Pore Size:0.20μm, lengh:20inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPD003NS10PED CMPro-D PP Depth Cartridge Filter Pore Size:0.3μm, lengh:10inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPD003NS20PED CMPro-D PP Depth Cartridge Filter Pore Size:0.3μm, lengh:20inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPD005NS10PED CMPro-D PP Depth Cartridge Filter Pore Size:0.50μm, lengh:10inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPD005NS20PED CMPro-D PP Depth Cartridge Filter Pore Size:0.50μm, lengh:20inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPD010NS10PED CMPro-D PP Depth Cartridge Filter Pore Size:1.0μm, lengh:10inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote
CMPDN70NS10PED CMPro-D PP Depth Cartridge Filter Pore Size:70nm, lengh:10inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry Request a Quote

Description

Membrane Solutions CMPro-D series depth filter has been developed to effectively remove agglomerated particles and gels in all kinds of chemical mechanical polishing(CMP) slurry, while keeping valid abrasive remained and particle distribution unchanged. Unique 3D composite structure has been utilized to manufacture graded depth polypropylene medium with tapered pores. The outer section(upstream) is consisted of continuous melt blown media that maximize contaminant holding capacity, contributes to long service life and effectively lower cost. The inner section(downstream) is consisted of nano fiber wrapped media that provide excellent removal efficiency and reliable filtration.

Features

  • The large gradient design can ensure filtration efficiency and maximize service life of the filter.

  • The ultra-fine fiber of the inner layer provides excellentretention of defect-causing particles while allowing desired abrasives to pass through.

  • Longer service life can effectively lower the cost.

  • All polypropylene construction, using no surfactantsor binders to ensure low level of precipitation.

Technical Parameters

Materials

Filter Layers/Support

Polypropylene

Core/End Cap

Polypropylene

O-ring

EPDM

Removal Rating

70nm, 0.1μm, 0.2μm, 0.3μm, 0.5μm, 0.7μm, 1.0μm

Dimensions

Outer Diameter

69mm

Length

10inch, 20inch

Max. Operating Conditions

Max. Forward Differential Pressure

0.52 MPa (75 psi) @ 25 ℃ (77 °F)

0.19 MPa (27 psi) @ 82 ℃ (179 °F)

Max. Reverse Differential Pressure

0.21 MPa (30 psi) @ 25 ℃ (77 °F)

Max. Operating Temperature

80 ℃ (176 °F) ;

 Flow Rate VS. Differential Pressure Performance

Dimensions

Ordering Information

CMPD

Removal Ratings

End Cap

Diameter

Length

O-ring

Cleanliness

Package

N70 (70nm)

001 (0.1μm)

002 (0.2μm)

003 (0.3μm)

005 (0.5μm)

007 (0.7μm)

010 (1.0μm)

 

N(222 Flat)

F(Double open-end gasket)

 

S(Diameter=69mm)

10 (10”)

20 (20”)

 

P (EPDM)

E(Electronic)

D (Dry)

W (UPW Prewet)

 

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