CMPro-M Series PP Melt Blown Depth Filter Cartridge with High Flux for CMP
Request a Quote| Item No | Product Name | Description | |
|---|---|---|---|
| CMPM030N610PED | CMPro-M PP Depth Cartridge Filter | Pore Size:3.0μm, lengh:10inch, OD:64mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry | Request a Quote |
| CMPM030N620PED | CMPro-M PP Depth Cartridge Filter | Pore Size:3.0μm, lengh:20inch, OD:64mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry | Request a Quote |
| CMPM050N610PED | CMPro-M PP Depth Cartridge Filter | Pore Size:5.0μm, lengh:10inch, OD:64mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry | Request a Quote |
| CMPM050N620PED | CMPro-M PP Depth Cartridge Filter | Pore Size:5.0μm, lengh:20inch, OD:64mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry | Request a Quote |
| CMPM090N610PED | CMPro-M PP Depth Cartridge Filter | Pore Size:9.0μm, lengh:10inch, OD:64mm, Adapter Type:222/FlDM, Core:Polypropylenat, Sealing:EPe, Package: Dry | Request a Quote |
| CMPM090N620PED | CMPro-M PP Depth Cartridge Filter | Pore Size:9.0μm, lengh:20inch, OD:69mm, Adapter Type:222/Flat, Sealing:EPDM, Core:Polypropylene, Package: Dry | Request a Quote |
Description
Membrane Solutions CMPro-M series depth filters are specially designed for bulk slurry filtration for SDS(slurry delivery system). Manufactured by composite structure polypropylene media with a unique graded-density design that enables it to address CMP filtration challenges. By tapered pores，CMPro-M accomplishes a great balance between excellent retention efficiency of agglomerates and high contaminant capacity. It can effectively remove only disruptive particles from the CMP slurry and the particle size distribution(PSD) of the valid slurry particles does not changed after filtration. CMPro-M can meet various CMP applications in different situations, including Oxide CMP, STI CMP and Metal CMP.
Features
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Graded filter structure ensures high filtration efficiency.
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Steep efficiency curves can significantly improve the filtration rate of oversized particles while minimizing the filtration of valid particles.
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Optimized Life Time and lower cost.
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Low extractables due to free of surfactants and binders.
Technical Parameters
|
Materials |
Filter Layers/Support |
Polypropylene |
|
Core/End Cap |
Polypropylene |
|
|
O-ring |
EPDM |
|
|
Removal Rating |
3.0μm, 5.0μm, 7.0μm, 9.0μm, 11.0μm |
|
|
Dimensions |
Outer Diameter |
64mm |
|
Length |
10inch, 20inch |
|
|
Max. Operating Conditions |
Max. Forward Differential Pressure |
0.52 MPa (75 psi) @ 25 ℃ (77 °F) 0.19 MPa (27 psi) @ 82 ℃ (179 °F) |
|
Max. Reverse Differential Pressure |
0.21 MPa (30 psi) @ 25 ℃ (77 °F) |
|
|
Max. Operating Temperature |
80 ℃ (176 °F) ； |
|
Flow Rate VS. Differential Pressure Performance
Dimensions
Ordering Information
|
CMPM |
Removal Ratings |
End Cap |
Diameter |
Length |
O-ring |
Cleanliness |
Package |
|
030(3.0μm) 050 (5.0μm) 070 (7.0μm) 090 (9.0μm) 110 (11.0μm) |
N(222 Flat) F(Double open-end gasket)
|
6(Diameter=64mm) |
10 (10”) 20 (20”)
|
P (EPDM) |
E（Electronic） |
D (Dry) W (UPW Prewet) |
