Electronic Chemical
Ultra-clean and high purity reagents used in the microelectronics industry are commonly known as process chemicals internationally, and are called wet chemicals in the United States, Europe and Taiwan, China. They are one of the indispensable chemical materials in the process of micro-fabrication of electronic technology and are used for chip cleaning and etching. Their cleanliness and purity have a significant impact on the yield, electrical performance and reliability of integrated circuits, mainly controlling the content of particles and ions in the reagents. Membrane Solutions uses advanced equipment and technology to strictly control the cleanliness of the filtration products, and produces products with low precipitation and low metal ions, which provides help for the stable, safe and reliable production of semiconductor industry.
| Process Technology | Membrane Solutions Recommended Filter Cartridge Series |
| Special Chemicals Filtration | FluorPure-EV Hydrophobic All Fluorine Filter Cartridge with PVDF Cage（FEV Series） Hydrophobic All Fluorine Filter Cartridge with PVDF Cage |
| AfsPure All Fluorine Pleated（ACG Series/AFG Series） PFA All Fluorine Filter Cartridge with Strong Chemical Compatibility | |
| UltiPure Small Blue All Fluorine Filter Cartridge（Ø83 AF Series） All Fluorine Filter Cartridge with High Flow Rate and High Cleanliness | |
| Wet-Fluoride Series All Fluorine Filter Cartridge All Fluorine Filter Cartridge for SEMI Wet Process | |
| Wet-Fluoride Series All Fluorine Capsule Filter All Fluorine Capsule Filter for SEMI Wet Process | |
| Wet-Vast Series PTFE Pleated Filter Cartridge with HDPE Cage for SEMI Wet Process | |
| Wet-Mega Series PTFE Pleated Filter Cartridge with PP Cage for SEMI Wet Process | |
| Wet-Fluoride Series | |
| Wet-Vast Series | |
| Wet-Mega Series | |
| CF/CL Series | |
| AfsPure All Fluorine Series | |
| Clean-Nova Series | |
| Clean-Gard Series | |
| SteriPure-S Series | |
| Photo-Unix Series | |
| Photo-Novel Series | |
| Policap-Plus Point-of-Use(POU) CMP Capsule Filter | |
| Policap Point-of-Use(POU) Compact CMP Capsule Filter | |
| CMPro-P Series | |
| CMPro-D Series | |
| FluorPure-BG Series |
For detailed technical solutions and product series information, please contact your MS sales engineer.
Products About Electronic Chemical
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AfsLock Series All Fluorine Filter Fousing
AfsLock PFA filter housing offers an excellent space-saving solution. The filter housing locks the filter cartridge into the housing, allowing simultaneous installation/disassembly of the filter cartridge and the filter housing, minimizing the risk of exposure to contaminants and chemicals.
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APH Series All Polypropylene Filter Housing
APH series all-polypropylene filter housing is 100% made of PP (polypropylene) material. With the excellent chemical properties of PP material, the filter housing can meet the filtration applications of many chemical acid and alkali solutions and can be matched with 68mm and 83mm diameter filter cartridges to meet the requirements of different flow rates. The adaptor of the filter cartridge adopts 222 or 226 double O-ring seals to ensure the tightness of filtration. 130APH series is designed for filter cartridges of 130 series, and is suitable for 10" filter cartridges with standard 334 seal joints. The design of the housing is simple and compact, and it is easy to install and use.
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Clean-Gard Series-PES Pleated Filter Cartridge with Ultra-pure PP Component
Membrane Solutions Clean-Gard series filters are used for dilute acids and bases and other process chemicals as a cost-effective alternative for wet etch and clean applications.The PES membrane provides significant characteristics including high flow rates, high dirt holding capacity and longer filter lifetime. In addition, the membrane structure reduces bubbles formation during flow.
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Clean-Nova Series-PES Pleated Filter Cartridge with Ultra-pure HDPE Component
Membrane Solutions Clean-Nova series filters are high flow rate, longer lifetime product which especially designed for filtration of weak acids, bases and ultra-pure DI water for the electronics industry. When operated at ambient temperature, the PES filter is compatible with a wide range of wet etch & clean solutions.
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CMPro-D Series High Precision PP Melt Blown Depth Filter Cartridge for CMP
Membrane Solutions CMPro-D series depth filter has been developed to effectively remove agglomerated particles and gels in all kinds of chemical mechanical polishing(CMP) slurry, while keeping valid abrasive remained and particle distribution unchanged. Unique 3D composite structure has been utilized to manufacture graded depth polypropylene medium with tapered pores. The outer section(upstream) is consisted of continuous melt blown media that maximize contaminant holding capacity, contributes to long service life and effectively lower cost. The inner section(downstream) is consisted of nano fiber wrapped media that provide excellent removal efficiency and reliable filtration.
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CMPro-P Series Polypropyene Membrane Pleated Depth Filter
CMPro-P series cartridges consist of a pleated multi-layer gradient polypropylene membrane with a polypropylene cage. Ideal for the removal of large particles and colloids from chemical mechanical polishing (CMP) fluids, this series is particularly suited to the filtration of grinding fluids used in oxide, tungsten metal and copper metal CMP processes. It effectively removes agglomerated particles and colloidal impurities from slurry. In addition, the wide, deep fold design of the CMPro-P cartridge dramatically increases the filtration area and dirt-holding capacity, resulting in ultra-low pressure loss and long service life.
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EPC/EHC Capsule Filter
EPC/EHC Series Capsule Filter includes various filtering media, removal ratings, filtering area, and adaptor types and sizes to meet different operating conditions. The Capsule Filter is thermally welded into the housing without any adhesive, ensuring no risk of fiber shedding. This compact structure is easy to replace, reducing operator contact with solvents during operation and significantly enhancing safety.
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EPC/EHC Capsule Filter
EPC/EHC Series Capsule Filter includes various filtering media, removal ratings, filtering area, and adaptor types and sizes to meet different operating conditions. The Capsule Filter is thermally welded into the housing without any adhesive, ensuring no risk of fiber shedding. This compact structure is easy to replace, reducing operator contact with solvents during operation and significantly enhancing safety.
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LMH Series Liquid Multicore Filter Housing
LMH series multicore sanitary liquid filter housing series can meet the flow requirements of different sizes and can be equipped with different numbers and specifications of filter cartridges according to different flow requirements. The design of the filter housing fully meets the requirements of sanitary grade and GMP, and the structure has no dead angle and is easy to clean; the drainage is complete and there is no concern about residual liquid; the filter housing can be electropolished at the same time of mechanical polishing, which completely solves the problem of polishing dead angle. For some applications where the cleaning is very demanding, the filter plate can be made detachable to achieve full-angle cleaning, and PP melt-blown, string wound and various types of pleated filter cartridges can be installed inside as filter elements to meet different process requirements. It is widely used in the prefiltration and terminal precision filtration of bio-pharmaceuticals, food and beverage, pure water, biological engineering and other industries.
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Photo-Novel Series -Filter Cartridge for Photoresist, Organic Solvents and Other Processes
Membrane Solutions Photo-Novel series Nylon filters have high flow rate performance, good retention rate and excellent organic cleanliness. It is especially designed for photoresists, solvent and other chemicals in SEMI-Photo processes.The Nylon membrane used in Photo-Unix series filters is naturally hydrophilic nylon materials. It possesses low metal and particle cleanliness, and most important is the very low level of organic extraction.
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Photo-Unix Series - UPE Pleated Filter Cartridge for Photoresist, Organic Solvents and Other Processes
Membrane Solutions Photo-Unix series UPE filters have a large range removal ratings from 2nm to 0.2μm. Cartridge filters ensure excellent retention capabilities, cleanliness and high chemical compatibility to meet the critical demands in SEMI-Phot processes. The UPE membrane materials ensues cleanliness, low particle shedding and eliminates contaminants, thereby improving removal efficiency. In addition, the filter’s large membrane surface area provides high flow rate and extended service lifetime.
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PhotoPure-PR Capsule Filter
The PhotoPure-PR series filters are designed for terminal filtration of photoresists and inks. The triple-port capsule design ensures clean and convenient use and replacement of filters. Compatible with different filter membranes and removal ratings, it meets various filtration requirements.
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Policap-Plus Point-of-Use(POU) CMP Capsule Filter
Membrane Solutions PoliCap-Plus point-of-use(POU) capsule is specially designed for advanced CMP applications, especially optimized for colloidal silica, ceria, and very fine alumina-based slurries. Structurally, the convenient disposable design allows for quick installation, minimizes exposures to the slurries and reduces waste. PoliCap-Plus capsules are available with melt-blown or membrane-rolled filter media, meanwhile, available with flexibility connector options.
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Policap Point-of-Use(POU) Compact CMP Capsule Filter
The pure PP material, compact structure, and disposable nature offer advantages of low cost and easy replacement. It can accommodate either wound or pleated filter cartridges, which can be selected based on the filtration scenario. With multiple interface options and the convenient capsule-style design for easy replacement, it is widely used in low-flow applications across various industries, such as semiconductor CMP processes, MLCC slurry filtration, ink, and other industries.
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PolyPure-D Series（PPD Series）PP Pleated Filter Cartridge with High Dirt Holding Capacity
The PPD series utilizes gradient pore fiber depth filtration technology, combined with filter membranes of varying thicknesses, greatly enhancing the dirt-holding capacity of the filter. This design prevents clogging of the filter's surface, with the upstream pore size being coarser and the downstream finer, allowing for graded retention of impurity particles. The service life is more than twice that of ordinary filters, reducing replacement frequency and lowering usage costs. The high dirt-holding capacity and deep pleated design make it widely used in high-load applications such as semiconductor CMP processes, cleaning points in panel new energy, and MLCC slurry filtration.
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CMPro-L Series Polypropyene Membrane Winded Depth Filter
The CMPL series filter cartridges are made from multiple gradient polypropylene filter membranes that are continuously wound. Due to their multi-layer structure, they offer higher efficiency than standard melt-blown and pleated filters. The carefully designed gradient pore configuration forms a deep dirt-holding structure, providing excellent flow rates and extended service life. With a maximum precision of 0.05μm, they effectively remove both gels and particles. The multi-gradient, high dirt-holding capacity, and high-efficiency deep structure are specifically designed for slurry filtration in semiconductor CMP processes, lithium batteries, and MLCC applications.
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FluorPure-BG Series - High-effective Hydrophobic PTFE Pleated Filter Cartridge for Gas Filtration
FBG series PTFE pleated filter cartridge is made of naturally hydrophobic sterile-grade PTFE membrane, which has excellent uniformity of pore and proven sterilization efficiency, and can provide reliable sterility guarantee for high humidity gas.
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CF/CL Series - PTFE Pleated Filter Cartridge with High Flow Rate and Long Service Life
CF/CL series PTFE pleated filter cartridge is made of high porosity PTFE membrane, and high resistance polypropylene material, with ultra-high flow rate and long service life, which have wide chemical compatibility, can be applied to the filtration of different chemical reagents. Also the CL type provide hydrophilic membrane, no need pre-wetting treatment before used, which can reducing pollution and reducing replacement costs.
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FluorPure-EV/ECTFE Half-Fluorine Series - PTFE Pleated Filter Cartridge with Anti-oxidation and Excellent Chemical Resistance
FEV series semi-fluorinated filter element adopts PVDF cage/core and support layer, and uses high-temperature hot melt technologyto complete welding sealing. The product has excellent chemical compatibility and cleanliness, and is widely used in oxidizingenvironments and filtration of a variety of highly corrosive solutions. In addition, the hydrophilic filter media can be used for the filtration of various high surface tension reagents without pre-wetting treatment.
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AfsPure All Fluorine Series - All Fluorine Filter Cartridge with Strong Chemical Compatibility
The AfsPure series perfluorinated filter cartridge is composed of high-porosity PTFE membrane and high-purity PFA plastic parts, which has excellent resistance and stability inhighly corrosve acid, alkali and organic solvent environments. Through post-treatment and 18.2M Ω .cm UPW flush, it can achieve a stable high cleanliness level and ensure thestability of filtration, which is the most cost-effective product for high-purity electronicchemical reagent filtration in the semiconductor industry.
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SSFH Series Stainless Steel Lined Fluorine Filter Housing
SSFH series fluorine-lined filter series stainless steel fluorine-lined filter housing is specially developed for the filtration of strong acid, strong alkali and other strong corrosive liquids; all parts of the filter housing in contact with the liquid are lined with PTFE to protect stainless steel from corrosion; PTFE-lined filter housing can withstand high temperature, will not be deformed, will not fall off, and has a smooth surface; the filter housing can be processed with stainless steel or carbon steel. The filter housing has a long service life and is filled with filter cartridges of various removal ratings, which can provide a very high retention effect.
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SteriPure-S Series - PS Pleated Filter Cartridge with High Precision and Efficiency
SteriPure-S Series pleated filters utilize a hydrophilic polysulfone membrane with a gradientstructure, providing excellent initial flux, highdirt holding capacity, and long service life. They are ideal for ultra-pure water, process chemical, and low precipitation pure water filtration.
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Wet-Fluoride Series -All Fluorine Filter Cartridge with Ultra-high Cleanliness
Membrane Solutions Wet-Fluoride series filters are All-PTFE structure. The filters use high flow rate PTFE membranes. This kind of filters is especially designed for chemicals including SC1, SC2, 49HF, HNO3, EKC and NMP in SEMI-WEC application.
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Wet-Mega Series - PTFE Pleated Filter Cartridge with Ultra-pure PP Component
Membrane Solutions Wet-Mega series filter is constructed of a PTFE membrane that provides excellent chemical compatibility and it is inherently hydrophobic. It is specially designed to low metal iron extraction to meet the requirements of chemicals and organic solvents in the electronics industry.
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Wet-Vast Series - PTFE Pleated Filter Cartridge with Ultra-pure HDPE Component
Membrane Solutions Wet-Vast series filter is a combination of PTFE Membrane and HDPE support/core/cage. PTFE and HDPE materials possess good chemical compatibility which make it suitable for large range of liquid chemical application. It effectively removes particles from high purity chemicals in SEMI industry. Available in a wide range of retention ratings and pore sizes to meet customer’s requirements.