Electronic Chemical
Wet electronic chemicals, also known as ultra‑clean high‑purity electronic chemicals, belong to the branch of electronic chemicals. They are various liquid chemical materials used in wet process steps (mainly including wet etching, cleaning, developing, stripping, etc.) in microelectronics and optoelectronics. They are mainly applied in the pan‑semiconductor field (wafers, display panels, solar cells) for cleaning, etching, and other wet processes during manufacturing.
In the manufacturing of wafers, display panels, and solar cells, the cleanliness of the silicon wafer surface is critical to performance, yield, and display resolution, so every manufacturing process includes a cleaning step. The role of wet chemicals is to use the corrosive and soluble properties of chemical agents to remove organic contaminants remaining on the wafer surface and reduce the residual amount of metallic impurities during the cleaning process.
What are the grades of wet electronic chemicals?
Wet electronic chemicals are key basic chemical materials in integrated circuit manufacturing and important wafer fabrication materials. The lower the metallic impurity content and the smaller the particle size of wet electronic chemicals, the more suitable they are for advanced wafer process technologies. Therefore, the core indicator of wet electronic chemicals is "purity". The International Semiconductor Equipment and Materials Industry Association (SEMI) classifies the purity grades of wet electronic chemicals based on the actual global development of these chemicals, dividing them into five grades from SEMI G1 to SEMI G5. These correspond to different technology levels of integrated circuits (chips); the higher the standard required for wet electronic chemicals, the higher the purity and cleanliness requirements.
Application fields of wet electronic chemicals
Wet electronic chemicals are mainly produced from upstream raw materials such as hydrochloric acid (HCl), sulfuric acid (H₂SO₄), hydrofluoric acid (HF), hydrogen peroxide (H₂O₂), ammonia water (NH₃·H₂O), sodium hydroxide (NaOH), potassium hydroxide (KOH), acetone, ethanol, isopropanol, etc., through processes including pretreatment, filtration, and purification. The main downstream application fields are photovoltaic solar cells, flat panel displays, and semiconductors. The main process applications include cleaning, etching, doping, photolithography, developing, wafer surface treatment, film stripping, and photoresist removal in integrated circuit manufacturing.
Table : Technical requirements and grade matching
|
Field |
Typical Grade |
Core Processes |
Representative Chemicals |
|
Semiconductor |
G4–G5 |
Wafer cleaning, etching, photolithography developing |
HF/NH₄F (etchant), H₂SO₄/H₂O₂ (photoresist stripper) |
|
Flat Panel Display |
G3–G4 |
Glass substrate cleaning, thin-film etching, ITO patterning |
TMAH/KOH/NaOH (developer), FeCl₃/HCl/CH₃COOH (etchant), acetone/isopropanol (cleaning agents) |
|
Solar Cells |
G1–G2 |
Silicon wafer cleaning, surface texturing, PSG removal |
KOH (wafer cleaning), HF/HNO₃ (texturing agent), HF/HCl (damage removal) |
Membrane Solutions Wet Electronic Chemical Filter Cartridge Product Recommendations
Membrane Solutions uses advanced equipment and processes to strictly control the cleanliness of filtration products, meeting the filtration needs of different customers. We offer high‑performance filter cartridges for panel and semiconductor applications, providing low‑extraction, low‑metal‑ion products to support stable, safe, and reliable production in the microelectronics industry.
|
Chemical Medium Type / Application Scenario |
Typical Process Steps |
Key Selection Requirements |
Recommended Membrane Material & Structure |
Corresponding Membrane Solutions Product Series |
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Strong acids, strong alkalis, and high‑temperature corrosive media (e.g., 49% HF, SC1, SC2, NMP, EKC, etc.) |
Semiconductor wet etching, high‑temperature wafer cleaning |
Extremely high chemical resistance; extremely low metal ion and organic extractables; cleanliness up to ppt level |
All‑fluorine construction (PTFE membrane / PFA housing) |
EXafPure WF@EA Series, EXafPure WB Series,AfsLock Series (PFA filter housing) |
|
Strong acids, strong alkalis, and high-purity chemical filtration |
Semiconductor wet etching and cleaning, chemical distribution and recirculation filtration |
High cleanliness, superior chemical compatibility; high particle retention efficiency; high flow rate, low pressure drop |
PTFE membrane + high-purity HDPE components / PTFE membrane + high-purity PP components |
Wet-Vast Series, Wet-Mega Series |
|
Dilute acids, dilute alkalis, and ultrapure water (e.g., dilute HF, dilute HCl, UPW, etc.) |
Panel substrate cleaning, photovoltaic texturing, rinsing steps in wet cleaning |
High flow rate, high dirt‑holding capacity; low extractables; balance of filtration efficiency and operating economy |
PES (polyethersulfone) high‑asymmetry membrane |
Clean‑Nova Series, Clean‑Gard Series |
|
Photoresists, organic solvents, and high‑precision particle removal (e.g., developers, strippers, isopropanol, etc.) |
Photolithography, developing, resist stripping / removal processes |
High removal efficiency (precision from 2 nm to 0.2 μm); low particle shedding; high organic cleanliness |
UPE (ultra‑high molecular weight polyethylene) / Nylon membrane |
Photo‑Unix Series (UPE), Photo‑Novel Series (Nylon) |
|
R&D pilot testing, multi‑product switching, and flexible connection needs (various small‑batch or customized chemical filtration) |
Laboratory testing, small‑batch production lines, equipment‑mounted filtration |
Easy installation, reliable sealing; flexible membrane material options; diverse connection types (NPT, Swagelok, Flaretek) |
Capsule configuration (with built‑in PTFE/UPE/PES/Nylon and other membrane materials) |
EPC/EHC Series Capsule Filters |
Membrane Solutions has long focused on the R&D and manufacturing of high‑purity filtration products for the microelectronics field. We can provide customers in integrated circuits, display panels, photovoltaics, and other fields with filter cartridge products and integrated filtration solutions suitable for different grade requirements from G1 to G5. For application-specific electronic chemical filtration selection or technical consultation, please contact your Membrane Solutions sales engineer.
Products About Electronic Chemical
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AfsLock Series All Fluorine Filter Housing
AfsLock PFA Cartridge Housing offers excellent space-saving solution. This housing locks the cartridge into the bowl, allowing the bowl and cartridge to be installed or removed as a single unit. Contamination and chemical contact are minimized.
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AfsLock-S Series All Fluorine Filter Housing
AfsLock-S PFA Cartridge Housing offers excellent space-saving solution. This housing locks the cartridge into the bowl, allowing the bowl and cartridge to be installed or removed as a single unit. Contamination and chemical contact are minimized.
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APH Series All Polypropylene Filter Housing
APH series polypropylene filter housing is made of PP (polypropylene) material. With the excellent chemical properties of PP material, the filter housing can meet the filtration applications of many chemical acid and alkali solutions and can be matched with 68mm and 83mm diameter filter cartridges to meet the requirements of different flow rates. The adaptor of the filter cartridge adopts 222 or 226 double O-ring seals to ensure the tightness of filtration. 130APH series is designed for filter cartridges of 130 series, and is suitable for 10" filter cartridges with standard 334 seal joints. The design of the housing is simple and compact, and it is easy to install and use.
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Clean-Gard Series-PES Pleated Filter Cartridge with UItra-pure PP Component
Membrane Solutions' Clean-Gard series filters are designed for dilute acids, bases, and various other process chemicals, providing an economical and efficient filtration solutions for wet etching and cleaning applications. The PES membrane structure provides significant characteristics, including high flow rates, a large dirt-holding capacity, and an extended filter lifespan. Additionally, the filter's folded design ensures stable flow properties, while its hydrophilic nature reduces bubble formation during flow.
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Clean-Nova Series-PES Pleated Filter Cartridge with Ultra-pure HDPE Component
Membrane Solutions' Clean-Nova series filters provide a high flow rate, long-life time and excellent particle removal performance, specifically designed for filtering weak acids/bases, and ultra-pure water used in the electronics industry. When operated at ambient temperature, the PES filter is compatible with a wide range of wet etching and cleaning solutions.
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FluorPure-ECTFE Pleated Filter Cartridge
EC series semi-fluorinated filter element adopts PVDF cage/core and support layer, ECTFE meltblown membrane as the flter layer, its depth filtration characteristics greatly extend the filtration life, especially suitable for corrosive, oxidizing and high temperature conditions of high solid content reagent filtration.
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ExafPure WB Series All-PTFE Pleated Filter Cartridge
Membrane Solutions ExafPure WB series filters feature an all-PTFE construction. The filters use high flow rate PTFE membranes and highly resistant PFA components, offering broad applicability and particular suitability for demanding conditions involving highly corrosive and high-temperature fluids. The high-porosity, high-flow membrane configuration delivers superior flow rates and excel lent cost-effectiveness.
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EXafPure WF&EA Series -All PTFE Filters with UItra-high Cleanliness
Membrane Solutions ExafPure series filters feature an all-PTFE construction. The filters use high flow rate, high-efficiency PTFE membranes and high-purity PFA components to meet the demanding requirements of semiconductor applications. These filters are specifically designed for chemicals including SC1, SC2, 49%HF, HNO3, EKC, and NMP used in SEMI wet processes.
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LMH Series Liquid Multicore Filter Housing
LMH series multicore sanitary liquid filter housing series can meet the flow requirements of different sizes and can be equipped with different numbers and specifications of filter cartridges according to different flow requirements. The design of the filter housing fully meets the requirements of sanitary grade and GMP, and the structure has no dead angle and is easy to clean; the drainage is complete and there is no concern about residual liquid; the filter housing can be electropolished at the same time of mechanical polishing, which completely solves the problem of polishing dead angle. For some applications where the cleaning is very demanding, the filter plate can be made detachable to achieve full-angle cleaning, and PP melt-blown, string wound and various types of pleated filter cartridges can be installed inside as filter elements to meet different process requirements. It is widely used in the prefiltration and terminal precision filtration of bio-pharmaceuticals, food and beverage, pure water, biological engineering and other industries.
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FluorPure-EV/ECTFE Half-Fluorine Series - PTFE Pleated Filter Cartridge with Anti-oxidation and Excellent Chemical Resistance
FEV series semi-fluorinated filter element adopts PVDF cage/core and support layer, and uses high-temperature hot melt technologyto complete welding sealing. The product has excellent chemical compatibility and cleanliness, and is widely used in oxidizingenvironments and filtration of a variety of highly corrosive solutions. In addition, the hydrophilic filter media can be used for the filtration of various high surface tension reagents without pre-wetting treatment.
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SSFH Series Stainless Steel Lined Fluorine Filter Housing
SSFH series fluorine-lined filter series stainless steel fluorine-lined filter housing is specially developed for the filtration of strong acid, strong alkali and other strong corrosive liquids; all parts of the filter housing in contact with the liquid are lined with PTFE to protect stainless steel from corrosion; PTFE-lined filter housing can withstand high temperature, will not be deformed, will not fall off, and has a smooth surface; the filter housing can be processed with stainless steel or carbon steel. The filter housing has a long service life and is filled with filter cartridges of various removal ratings, which can provide a very high retention effect.
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Wet-Mega Series - PTFE Pleated Filter Cartridge with UItra-pure PP Component
Membrane Solutions Wet-Mega series filter is constructed of a PTFE membrane that provides excellent chemical compatibility and it is inherently hydrophobic. It is specially designed to low meta iron extraction to meet the requirements of chemicals and organic solvents in the electronics industry.
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Wet-Vast Series - PTFE Pleated Filter Cartridge with Ultra-pure HDPE Component
Membrane Solutions Wet-Vast series filter is a combination of PTFE Membrane and HDPE support/core/cage. PTFE and HDPE materials possess good chemical compatibility which make it suitable for large range of liquid chemical application. It effectively removes particles from high purity chemicals in SEMI industry. Available in a wide range of retention ratings and pore sizes to meet customer's requirements.
