EXafPure WF Series -All PTFE Filters with Ultra-high Cleanliness

Membrane Solutions ExafPure WF series filters are All-PTFE structure. The filters use high flow rate PTFE membranes. This kind of filters is especially designed for chemicals including SC1, SC2, 49HF, HNO3, EKC and NMP in SEMI-WEC application. Excellent filter design could ensure low pressure drop across the filter and good particle removal performance. The fluoropolymer material possesses low concentration of extractables and other contaminants that may be detrimental to the process, and provides high retention performance in the application at the same time.
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Related Documents

ExafPure WF Series Datasheet

Features

  • Excellent flow performance and longer lifetime
  • Excellent chemical and temperature resistance
  • All fluoropolymer construction and very low extractables
  • Pre-wet option for convenience
  • 100% Integrity tested

Applications

 

 

Technical Parameters

Materials Membrane PTFE
Support, Core and Cage PFA
Cartridge O-ring TEV/FFKM
Disposable Shell PFA
Removal Rating 10nm, 20nm, 30nm, 50nm, 0.1μm, 0.2μm
Membrane Area SX (φ68mm)
SY (φ68mm)
0.91m²/10”
1.2m²/10”
MX (φ83mm) 1.8m²/10”
MY (φ83mm) 2.2m²/10”
MZ (φ83mm) 2.8m²/10”
Cartridge Filter Max.
Operating Conditions
Max. Forward Differential Pressure 0.5 MPa(72 psi)@25℃ (77℉)
0.2 MPa(29 psi)@100℃ (212℉)
0.05 MPa(7.25 psi)@180℃ (356℉)
Max. Reverse Differential Pressure 0.35 MPa(50 psi)@25℃ (77℉)
Max. Operating Temperature 180℃(356℉)
Disposables Max.
Operating Conditions
  Small In-Line X Type T Type S 300 dispoable
Max. Forward
Differential Pressure
0.4 MPa(58 psi)@25℃ 0.5 MPa(72 psi)@25℃
Max. Operating
Temperature
100℃(212℉) 180℃(356℉)
Package Dry; Prewet by UPW

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