GasPure Series - All PTFE Filters Cartridge for Special Gas Filtration

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GasPure Series Datasheet

Features

• Broad chemical compatibility
• High flow rate with high porosity and extremely long service life.
• Provide High efficiency
• Offered in multiple sizes.
• Clean workshop production uses hot melt welding technology, ensuring no pollution.

Applications

Technical Parameters

FAQ

1.How do you test metal ion levels of your filter cartridges? What is the current level?

Our testing methodology involves a 24-hour immersion of the filter cartridge in 10% HNO₃, followed by testing the concentration of metal ions extracted by nitric acid. Currently, our best achievable metal ion cleanliness level is below 3µg/device.

2.What products do you mainly supply for Wet process?

For the Wet process, all fluorine filter cartridges are primarily utilized. This is due to the predominantly chemical nature of Wet process fluids. All fluorine filter cartridges inherently offer superior chemical resistance, especially critical for high-temperature Specialty Process Materials (SPMs) and aggressive chemicals like phosphoric acid, for which PFA is often the only suitable material. We can also provide other membrane types such as PES (Polyethersulfone) cartridges.

3.Has your all fluorine filter cartridge reached the same standard as leading global brands?

Our all fluorine filter cartridges currently achieve a maximum removal rating of 10 nm. The technical specifications for our related membranes and filter cartridges are benchmarked against leading global brands. In the wet processing application, the industry predominantly employs all fluorine filter cartridges from globally recognized brands, making them the most widely adopted.

4.What is the typical service life of your filter cartridges?

The service life of filter cartridge is highly application-dependent. For example, even with two identical 0.1 µm all fluorine filter cartridges, if one is used on SC1 and the other on a resist stripper such as NMP, the cartridge on NMP will typically have a much shorter service life—often only 2–3 months—while the one on SC1 can generally last about a year.  From a cartridge design perspective, our products are engineered so that service life can be comparable to the original factory cartridges under the same operating conditions.

5.How do you test for metal-ion extractables/leachables? What performance level are you currently achieving? I noticed you previously provided ICP‑MS data.

Our test method is to soak the filter cartridge in 10% HNO₃ and then quantify the metal ions extracted from the acid. As for the specific metal-ion cleanliness target, it depends on the application and the cartridge type, so the control limits vary. In general:  
For 8-inch wafer fabs, we typically recommend a limit of ≤ 25 µg/device.
For 12-inch fabs, we can provide cartridges meeting ≤ 3 µg/device, or even ≤ 1 µg/device.
For reference, 3µg/device means that when a cartridge is extracted with 1 L of acid, the total metal-ion release is < 3 ppb (µg/L) in that extract. And since in real operation the daily chemical throughput is extremely large, the effective metal-ion contribution to the process chemical is correspondingly very low.

6.How are chemical grades differentiated? When recommending a filtration solution, what removal rating and what level of cleanliness can we typically recommend?

7.Is a PFA housing commonly used for wet electronic chemicals? What key considerations should we pay attention to when recommending it?

In wet electronic chemical applications, stainless steel lined fluorine filter housing and PFA housings are predominantly used. The demand for PFA housings is particularly high.
When recommending these solutions, beyond considering the filter housing's length and dimensions, it is crucial to also pay attention to:
1) Adaptor compatibility: Ensuring that the adaptor type and size are compatible with existing equipment. We currently offer a range of adaptor options to accommodate this.
I/O:1”Flaretek,V/D:1/2”Flaretek
I/O:1”Flaretek,V/D:1/4”Flaretek
I/O:3/4”Flaretek,V/D:1/2”Flaretek 
I/O:3/4”Flaretek,V/D:1/4”Flaretek
I/O:1”S300,V/D:1/2”S300
I/O:3/4”S300,V/D:1/2”S300
I/O:3/4”Super Pillar,V/D:1/2”Super Pillar
Some adaptors are available, but their use is not recommended.
2) Our 5-inch PFA housing is modified from a 10-inch housing, so the price of the 5-inch version is higher than the 10-inch version. This is mainly because the trimmed-off material cannot be reused, and the modification increases welding costs as well as the associated labor/rework cost.
3) Needs to confirm whether the customer requires a Locking Ring. We can supply Locking Rings in PVDF or PP.
4) The cap nut and end plugs for the PFA housing are optional accessories; we recommend that customers configure these themselves.

8.In wet electronic chemicals, what is the normal cartridge change-out interval under typical operating conditions? What symptoms or performance indicators mean the cartridge should be replaced?

Wet electronic chemicals are generally relatively clean, so the typical filter cartridge service life is about 6 to 12 months under normal operating conditions.  
We recommend replacing the cartridge when any of the following occurs:  
1) The maximum allowable differential pressure is reached;
2) The flow rate can no longer meet process requirements;
3) Abnormal contamination/particles are observed downstream.