Purity Drives Yield: Advanced Filtration for Next-Gen Microelectronics
Ultra-pure contamination control for critical liquid and gas processes—custom-engineered for yield at every advanced node
All PTFE Filters Highlights
All PTFE filter series for ultra-pure semiconductor chemicals. Features high-porosity PTFE membranes and high-purity All PTFE components for exceptional chemical inertness. Available as cartridges, capsules, and housings.
- ALL-PTFE-Fluoropolymer: Resists strong acids (including HF), alkalis, oxidizers; rated to 160C (membrane 260C).
- Ultra-Pure: Thermally welded, metal and binder-free. Ultra-low TOC and metal extractables meet strict semiconductor standards.
- High-Flow: Over 80 percent porosity, large area, low pressure drop, high dirt capacity. Extends life and lowers operating costs.
- Options: OD 68 or 83mm; Length 10 to 40 inches; Rating 0.05 to 10um; Dry or pre-wetted; Lock-key; Custom labeling.
Application
Case Studies
Critical high-purity chemical liquid supply filtration for CDS system in a modern semiconductor wafer fab
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Filtration of deionized water used for post-etch cleaning in advanced display panel fabrication is essential
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Critical high-purity filtration of RCA standard cleaning solution for epitaxia waters in semiconductor process fab
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Sic CMP slurry filtration at R&D tank -removes agglomerates and ensures uniform particle distributior
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Critical point of use slurry filtration for CMP machine to ensure overall wafer surface quality
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For electrode slurry coating in battery production,PP filters are the most frequently replaced items
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Product Catalog
Validation & Testing
Empowering Trust through Rigorous Validation. The MS TrustPlus Validation Center is a CNAS-accredited independent laboratory. We specialize in cleanliness validation (metal ions, anions, particles, NVR), ultrapure water rinse testing (TOC, resistivity), integrity testing, and filtration performance evaluation. We deliver rapid, comprehensive testing services to support product development and quality control for microelectronics applications.
testing USP <87>
Leachables Test
Efficiency Test
Capacity Test
