CMP（Chemical Mechanical Polishing）Slurry Filtration
Chemical Mechanical Polishing solutions have improved the process of creating multi-layer semiconductor circuits. By making the layers a uniform thickness, they allow the reliable deposition of multiple layers. The polishing process is repeated after each layer is created.
Bulk filtration is performed at both the slurry manufacturers and in slurry mixing and distribution systems at fabrication facilities. Because of the very high particulate loading of the slurries, multiple cartridges may be used to progressively remove oversize particulates from large volumes of solution to the level required by the polishing tools.
The final filters to protect the polishing process are in the tools at the fabrication facility. The point-of-use filter system will remove oversize particulates and, if the solution is recirculated, remove polishing debris.
Ultrapure water production
Achieving and maintaining ultrapure water is extremely important in light of its widespread presence throughout the manufacture of semiconductor integrated circuits.The technology of the industry has advanced so rapidly over the past few years that it has redefined cleanliness requirements, specifically with regard to the need for quantitatively removing colloidal silica, particles, total organic carbon (TOC), bacteria, pyrogens (bacterial fragments) and metal ions.
CMP Slurry Filtration Process
MS Experience in Semiconductor Filtration
Membrane Solutions has extensive experience in semiconductor filtration and separation technology, which allows us to design, develop and manufacture filtration solutions to suit every application. Our filter media is compatible with all commonly used solvents and chemicals, and is designed to provide consistent batch to batch chemical and water quality, long run periods between purge cycles and minimum hold-up volume to reduce wastage and product loss during change out.
Since our business became involved in semiconductor filtration industry, we have been making efforts to become more professional and authoritative in this field. During the rapid development phase, Membrane Solutions has established wide and long-term cooperation relationships with a great deal of semiconductor factories. These customers present enough confidence in us and our products, meanwhile, we membrane solutions, with responsible attitude, also manufacture high-quality products as well as appropriate solutions for our customers.
Join us. We have what you want!
Features-Benefits of MS® filters in Semiconductor filtration
Recommended MS® Products
MS® melt blown cartridge filter is one of the deep filtration products. Graded pore structure enhances dirt holding capacity, long service life and high contaminant removal efficiency.
MS® capsule filters are designed for critical, small volume filter applications in the coatings, fine chemicals, pharmaceuticals and microelectronics markets. They contain pleated, absolute-rated, filter media providing excellent retention of particles at fast flow rates.
MS® FluroPure PTFE Pleated Cartridge Filter is manufactured with advance hydrophilic, asymmetric polyethersulfone membranes. The PES membrane provides accurate particle cut-offs and is compatible with a broad range of chemicals.