Semiconductor Wet Process Filtration
One of the biggest challenges facing semiconductor manufacturing is surface contamination of silicon wafers. Studies have shown that defects brought about by contamination cause up to 80% of the electrical failures in chips. If there are contaminants in the wafer manufacturing process that are not completely removed, it will affect the yield of the wafers, and cause a whole wafer or even batches of wafers to be scrapped. Therefore, the semiconductor cleaning technology is one of the most critical steps in the semiconductor manufacturing process. As an important part of the semiconductor process, the wet technology etches and cleans the wafer surface through chemicals (acids, alkalis, solvents, etc.) and liquid media such as ultra-pure water. See the typical wafer cleaning process below.
The filter cartridge products of Membrane Solutions can provide filtration solutions with excellent performance. Some of them are specially designed for SC1, SC2, 49HF, HN03, EKC, NMP and other liquid filtration in semiconductor wet process applications. Many application filter cartridges suitable for various liquid have been developed, which can effectively remove particles in high purity chemicals used in the semiconductor industry, and escort to improve the yield of semiconductor process wafers.
Typical Cleaning Tank Process (Take SC1 as an example)
| Process Technology | Membrane Solutions Recommended Filter Cartridge Series |
| Semiconductor Wet Process Filtration | Wet-Vast Series - PTFE Pleated Filter Cartridge with Ultra-pure HDPE Component |
| Wet-Mega Series - PTFE Pleated Filter Cartridge with Ultra-pure PP Component | |
| FluorPure-BG Series - High-effective Hydrophobic PTFE Pleated Filter Cartridge for Gas Filtration | |
| Clean-Nova Series -PES Pleated Filter Cartridge with Ultra-pure HDPE Component | |
| Clean-Gard Series-PES Pleated Filter Cartridge with Ultra-pure PP Component | |
| Wet-Fluoride Series -All Fluorine Filter Cartridge with Ultra-high Cleanliness |
For detailed technical solutions and product series information, please contact your MS sales engineer.
Products About Semiconductor Wet Process Filtration
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Clean-Nova Series-PES Pleated Filter Cartridge with Ultra-pure HDPE Component
Membrane Solutions Clean-Nova series filters are high flow rate, longer lifetime product which especially designed for filtration of weak acids, bases and ultra-pure DI water for the electronics industry. When operated at ambient temperature, the PES filter is compatible with a wide range of wet etch & clean solutions.
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Wet-Vast Series - PTFE Pleated Filter Cartridge with Ultra-pure HDPE Component
Membrane Solutions Wet-Vast series filter is a combination of PTFE Membrane and HDPE support/core/cage. PTFE and HDPE materials possess good chemical compatibility which make it suitable for large range of liquid chemical application. It effectively removes particles from high purity chemicals in SEMI industry. Available in a wide range of retention ratings and pore sizes to meet customer’s requirements.