Photo-Novel Series -Filter Cartridge for Photoresist, Organic Solvents and Other Processes

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Description

Membrane Solutions Photo-Novel series Nylon filters have high flow rate performance, good retention rate and excellent organic cleanliness. It is especially designed for photoresists, solvent and other chemicals in SEMI-Photo processes.The Nylon membrane used in Photo-Unix series filters is naturally hydrophilic nylon materials. It possesses low metal and particle cleanliness, and most important is the very low level of organic extraction.

Features

  • High Efficiency

  • Naturally Hydrophilic

  • Excellent organic extraction cleanliness

  • Manufactured in cleanroom

  • 100% Integrity tested

Technical Parameters

Materials

Membrane

Nylon 66

Support, Core and Cage

HDPE/PP

O-ring(222)

EPDM/TEV

Removal Rating

2nm, 5nm, 10nm, 20nm, 30nm, 50nm, 0.1μm

Membrane Area

SX (φ68mm)

0.7 m2 /10”

SY (φ68mm)

1.3 m2 /10”

Max. Operating Conditions

Max. Forward Differential Pressure

0.34 MPa (49 psi) @ 25 ℃ (77 °F)

Max. Reverse Differential Pressure

0.24 MPa (34 psi) @ 25 ℃ (77 °F)

Max. Operating Temperature

40 ℃ (104 °F) ;

Package

Dry;Prewet by UPW

Flow Rate VS. Differential Pressure Performance


 

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