PoliCap-Plus Terminal(POU)Slurry Capsule Filter-CapsuleFilter for CMP Terminal

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Item No Product Name Description
PCPD001S05E0ED PoliCap-Plus PP Capsule Filter Pore Size: 0.1μm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: Easy-Touch Request a Quote
PCPD002S05F3ED PoliCap-Plus PP Capsule Filter Pore Size: 0.2μm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: I/O 3/8”Flaretek® Request a Quote
PCPD003S05E0ED PoliCap-Plus PP Capsule Filter Pore Size: 0.3μm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: Easy-Touch Request a Quote
PCPD005S05F3ED PoliCap-Plus PP Capsule Filter Pore Size: 0.5μm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: I/O 3/8”Flaretek® Request a Quote
PCPD007S05E0ED PoliCap-Plus PP Capsule Filter Pore Size: 0.7μm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: Easy-Touch Request a Quote
PCPD007S05F3ED PoliCap-Plus PP Capsule Filter Pore Size: 0.7μm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: I/O 3/8”Flaretek® Request a Quote
PCPD010S05E0ED PoliCap-Plus PP Capsule Filter Pore Size: 1.0μm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: Easy-Touch Request a Quote
PCPDN70S05E0ED PoliCap-Plus PP Capsule Filter Pore Size: 70nm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: Easy-Touch Request a Quote
PCPDN70S05F3ED PoliCap-Plus PP Capsule Filter Pore Size: 70nm, Length:5 inch, Media:PP, OD: 93.0mm, Connection: I/O 3/8”Flaretek® Request a Quote

Description

Membrane Solutions PoliCap-Plus point-of-use(POU) capsule is specially designed for advanced CMP applications, especially optimized for colloidal silica, ceria, and very fine alumina-based slurries. Structurally, the convenient disposable design allows for quick installation, minimizes exposures to the slurries and reduces waste. PoliCap-Plus capsules are available with melt-blown or membrane-rolled filter media, meanwhile, available with flexibility connector options.

Features

  • All-polypropylene construction for low cost.

  • Disposable design for easy change-outs and minimizes exposures to the slurries.

  • Low hold-up volume, to reduce slurry waste and prevent deposition.

  • Flexibility in connector options.

  • Low pressure drop and excellent removal efficiency.

  • High contaminant holding capacity and long service life.

Technical Parameters

Materials

Filter Layers/Support

Polypropylene

Cage/Core/End Cap

Polypropylene

O-ring

EPDM

Removal Rating

70nm, 0.1μm, 0.2μm, 0.3μm, 0.5μm, 0.7μm, 1.0μm

Connections

Inlet/Outlet

3/8" Flaretek1

Easy-touch

Vent/Drain

/

Dimensions

Outer Diameter

93mm

Inner Filter Diameter

69mm

Length

5inch

Max. Operating Conditions

Max. Operating Pressure

0.34 MPa (50 psi) @ 25 ℃ (77 °F)

Max. Forward Differential Pressure

0.24 MPa (35 psi) @ 21 ℃ (70 °F)

0.40 MPa (58 psi) @ 82 ℃ (176 °F)

Max. Reverse Differential Pressure

0.21 MPa (30 psi) @ 25 ℃ (77 °F)

Max. Operating Temperature

1Flaretek is a trademark of Entegris, Inc.

 Flow Rate VS. Differential Pressure Performance

Dimensions

Ordering Information

PCP

Filter Types

Removal Ratings

Diameter

Length

Connection

Cleanliness

Package

D (with depth filter)

N70 (70nm)

001 (0.1μm)

002 (0.2μm)

003 (0.3μm)

005 (0.5μm)

007 (0.7μm)

010 (1.0μm)

S(Diameter=69mm)

05 (5")

F3 (I/O: 3/8" Flaretek  no V/D)

E0 (Easy-touch no V/D)

  

E（Electronic）

D (Dry)

W (UPW Prewet)

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