Policap Point-of-Use(POU) Compact CMP Capsule Filter

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Product Description

The PoliCap series of Capsules are designed for advanced CMP applications where space is limited. The pure PP material, compact deign and disposable features provide the advantages of low cost and easy replacement. From a performance perspective, the meltblown or deep pleated media contained within the capsule filter efficiently removes scratch-causing particles or colloids from the CMPslurry while retaining the effective abrasive particles and keeping the particle size distribution(PSD) constant. The unique structural design of the filter media ensures relatively low pressure loss, excellent particle removal efficiency and long service life.

Feature

  • All-polypropylene construction for low cost.

  • Hot-melt welding with O-ring free.

  • Disposable design for easy change-outs and minimizes exposures to the slurries.

  • Available in different lengths and diameters, meeting various installation requirements.

  • Available for depth or depth-pleated filter media, meeting a variety of application requirements.

  • Low pressure drop and excellent removal efficiency.

Specifications

Materials Filter Layers/Support polypropylene
Cage/Core/End Cap polypropylene
Removal Rating Depth Type: 0.1μm, 0.2μm, 0.3μm, 0.5μm, 0.7μm, 1.0μm,3.0μm
Connections Inlet/outlet 3/8" Flaretek1 1/4" Flaretek1 1/4" NPT
Vent/drain 1/4" Flaretek1 1/8" NPT  
Dimensions Outer Diameter 70mm
Inner Filter Diameter 56mm
Lengths 2.5inch, 5inch
Max. Operating
Conditions
Max. Operating Pressure 0.5 MPa (73 psi) @ 25 ˚C (77 ˚F)
Max. Forward
Differential Pressure
0.5 MPa (75 psi) @ 25 ˚C (77 ˚F)
0.19 MPa (27 psi) @ 82˚C (179 ˚F)
Max. Operating Temperature 80 ˚C (176˚F)
1Flaretek is a trademark of Entegris, Inc.

Flow Rate VS. Differential Pressure Performance

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