MS® PTFE Filtration for Microelectronics

MS^®PTFE Filtration for Microelectronics Description

MS® PTFE membrane with the ability to repel water-based fluids (hydrophobic),can be used in many fields ,especially in microelectronics and semiconductor.This membrane can protect the devices from the external contaminant,such as water vapor, volatile organics, acid gases and so on.

Contamination Control for Micro-Electronics and Semiconductor

There are many forms of contamination in the environment that can reduce the reliability of microelectronics and semiconductor. Control strategies are summarized below.

Contaminant	Effect	Control Strategies
Particles	●Signal degradation	●High efficiency Membrane
	●Short Circuit
Oils	●Signal degradation	●Oleophobic Membrane
	●Short Circuit
Liquid Water	●Corrosion	●Hydrophobic Membrane
	●Short Circuit

Features & Benefits

High strength
High flow rates
Long autoclave life - minimizes costs
High chemical and thermal resistance
Resistant to ‘wetting-out’ in humid environments
Short circuits are prevented

Application

MICROELECTRONICS&SEMICONDUCTOR

Benefits:

Increased system reliability
Short circuits are prevented
Increased system reliability
Cost savings

APPLICATIONS OF HYDROPHOBIC MEMBRANE:

Hearing Aids
Mobile Phones
Electronic control units
Display (OLED, LCD, LED, etc.)
Portable electronic devices
Organic stripping agent
Photo resist
Chemical passivation
Electric conductive adhesive

Features

Strong hydrophobic
Contamination control
Keep the system sensitivity
Long service life

APPLICATIONS OF HYDROPHILIC MEMBRANE:

Cleaner（UPW，N-(NMP)，HF/H2O(DHF)）
Developing agent（Stoddart solution ,TMAH）
Etching agent(HF/NH4F,acetic acid,H3PO4,HNO3/H2O/HF)

Features

Strong hydrophilic
Not pre-wetted
Dry preservation
Low cost

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MS® PTFE Filtration for Microelectronics