
Wet-Fluoride Series All Fluorine Filter Cartridge(All Fluorine Filter Cartridge for SEMI Wet Process)
Request a QuoteItem No | Product Name | Description | |
---|---|---|---|
WFCAMXN10TRD | Wet-Fluoride All-PTFE Cartridge Filter | Pore Size: 0.02μm, Length: 10inch, OD: 83mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Dry | Request a Quote |
WFCAMXN10TRW | Wet-Fluoride All-PTFE Cartridge Filter | Pore Size: 0.02μm, Length: 10inch, OD: 83mm, Adapter Type: 222/Flat, Sealing: TEV, Package: Pre-wetted package | Request a Quote |
WFCBSXN10TRW | Wet-Fluoride All-PTFE Cartridge Filter | Pore Size: 0.10μm, Length: 10inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Pre-wetted package | Request a Quote |
WFCCSXK10TRW | Wet-Fluoride All-PTFE Cartridge Filter | Pore Size: 0.03, Length: 10inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Pre-wetted package | Request a Quote |
WFCHRSXN20TED | Wet-Fluoride All-PTFE Chemical Filter | Pore Size: 0.50μm, Length: 20inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Dry | Request a Quote |
WFCHSXN20TED | Wet-Fluoride All-PTFE Chemical Filter | Pore Size: 0.50μm, Length: 20inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Dry | Request a Quote |
WFCJHSXN10TRD | Wet-Fluoride All-PTFE Cartridge Filter | Pore Size: 0.20μm, Length: 10 inches, Area Grade: 0.91m2, Adapter Type: 222/Flat, Sealing: FEP Encapsuled FKM,, Package: Dry | Request a Quote |
WFCLHSXN20TED | Wet-Fluoride All-PTFE Chemical Filter | Pore Size: 5μm, Length: 20 inches, Area Grade: 0.91m2, Adapter Type: 222/Flat, Sealing: FEP Encapsuled FKM, Package: Dry | Request a Quote |
WFCLSXN20TED | Wet-Fluoride All-PTFE Chemical Filter | Pore Size: 5μm, Length: 20 inches, Area Grade: 0.91m2, Adapter Type: 222/Flat, Sealing: FEP Encapsuled FKM, Package: Dry | Request a Quote |
WFCMSXN10TED | Wet-Fluoride All-PTFE Chemical Filter | Pore Size: 10μm, Length: 10 inches, Area Grade: 0.91m2, Adapter Type: 222/Flat, Sealing: FEP Encapsuled FKM, Package: Dry | Request a Quote |
Description
Membrane Solutions Wet-Fluoride series filters are All-PTFE structure. The filters use high flow rate PTFE membranes. This kind of filters is especially designed for chemicals including SC1, SC2, 49HF, HNO3 , EKC and NMP in SEMI-WEC application. Excellent filter design could ensure low pressure drop across the filter and good particle removal performance. The fluoropolymer material possesses low concentration of extractables and other contaminants that may be deterimental to the proceess, and provides high retention performance in the application at the same time.
Features
-
Excellent flow performance and longer lifetime
-
Excellent chemical and temperature resistance
-
All fluoropolymer construction and very low extractables
-
Pre-wet option for convenience
-
100% Integrity tested
Technical Parameters
Materials |
Membrane |
PTFE |
Support, Core and Cage |
PFA |
|
Cartridge O-ring |
TEV/FFKM |
|
Disposable Shell |
PFA |
|
Removal Rating |
10nm, 20nm, 30nm, 50nm, 0.1μm, 0.2μm |
|
Membrane Area |
SX (φ68mm) |
1.2 m2 /10” |
MX (φ81mm) |
1.8 m2 /10” |
|
MY (φ81mm) |
2.2 m2 /10” |
|
MZ (φ81mm) |
2.8 m2 /10” |
|
Max. Operating Conditions |
Max. Forward Differential Pressure |
0.5 MPa (72 psi) @ 25 ℃ (77 °F) 0.2 MPa (29 psi) @ 100 ℃ (212 °F) |
Max. Reverse Differential Pressure |
0.35 MPa (50 psi) @ 25 ℃ (77 °F) |
|
Max. Operating Temperature |
Cartridge 100 ℃ (212 °F) ; Disposable 180 ℃ (356 °F) |
|
Package |
Dry;Prewet by UPW |
Flow Rate VS. Differential Pressure Performance
Dimensions
Ordering Information
WFC |
Removal Ratings |
Diameter |
End Cap |
Length |
O-ring |
Metal Cleanliness |
Package |
E (10nm) A (20nm) C (30nm) G (50nm) B (0.1μm) J (0.2μm) |
SX (φ68mm, 0.9m2 ) MX(φ81mm, 1.8m2 ) MY(φ81mm, 2.2m2 ) MZ(φ81mm, 2.8m2 ) |
N(222 Plat) K(222 Plat with Lock-key) |
04 (4”) 10 (10”) 20 (20”) |
T (TEV) K (FFKM) |
U(<3ug/device) Q(<10ug/device) R(<25ug/device) E(Electronic) |
D (Dry) W (UPW Prewet) |
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