Wet-Fluoride Series All Fluorine Filter Cartridge(All Fluorine Filter Cartridge for SEMI Wet Process)

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Item No Product Name Description
WFCAMXN10TRD Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 0.02μm, Length: 10inch, OD: 83mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Dry Request a Quote
WFCAMXN10TRW Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 0.02μm, Length: 10inch, OD: 83mm, Adapter Type: 222/Flat, Sealing: TEV, Package: Pre-wetted package Request a Quote
WFCBSXN10TRW Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 0.10μm, Length: 10inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Pre-wetted package Request a Quote
WFCCSXK10TRW Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 0.03, Length: 10inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Pre-wetted package Request a Quote
WFCHRSXN20TED Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 0.50μm, Length: 20inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Dry Request a Quote
WFCHSXN20TED Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 0.50μm, Length: 20inch, OD: 68mm, Adapter Type: 222/Flat, Sealing: FEP Encapsulated FKM, Package: Dry Request a Quote
WFCJHSXN10TRD Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 0.20μm, Length: 10 inches, Area Grade: 0.91m2, Adapter Type: 222/Flat, Sealing: FEP Encapsuled FKM,, Package: Dry Request a Quote
WFCLHSXN20TED Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 5μm, Length: 20 inches, Area Grade: 0.91m2, Adapter Type: 222/Flat, Sealing: FEP Encapsuled FKM, Package: Dry Request a Quote
WFCLSXN20TED Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 5μm, Length: 20 inches, Area Grade: 0.91m2, Adapter Type: 222/Flat, Sealing: FEP Encapsuled FKM, Package: Dry Request a Quote
WFCMSXN10TED Wet-Fluoride All-PTFE Cartridge Filter Pore Size: 10μm, Length: 10 inches, Area Grade: 0.91m2, Adapter Type: 222/Flat, Sealing: FEP Encapsuled FKM, Package: Dry Request a Quote

Description

Membrane Solutions Wet-Fluoride series filters are All-PTFE structure. The filters use high flow rate PTFE membranes. This kind of filters is especially designed for chemicals including SC1, SC2, 49HF, HNO3 , EKC and NMP in SEMI-WEC application. Excellent filter design could ensure low pressure drop across the filter and good particle removal performance. The fluoropolymer material possesses low concentration of extractables and other contaminants that may be deterimental to the proceess, and provides high retention performance in the application at the same time.

Features

  • Excellent flow performance and longer lifetime

  • Excellent chemical and temperature resistance

  • All fluoropolymer construction and very low extractables

  • Pre-wet option for convenience

  • 100% Integrity tested

Technical Parameters

Materials

Membrane

PTFE

Support, Core and Cage

PFA

Cartridge O-ring

TEV/FFKM

Disposable Shell

PFA

Removal Rating

10nm, 20nm, 30nm, 50nm, 0.1μm, 0.2μm

Membrane Area

SX (φ68mm)

1.2 m2 /10”

MX (φ81mm)

1.8 m2 /10”

MY (φ81mm)

2.2 m2 /10”

MZ (φ81mm)

2.8 m2 /10”

Max. Operating Conditions

Max. Forward Differential Pressure

0.5 MPa (72 psi) @ 25 ℃ (77 °F)

0.2 MPa (29 psi) @ 100 ℃ (212 °F)

Max. Reverse Differential Pressure

0.35 MPa (50 psi) @ 25 ℃ (77 °F)

Max. Operating Temperature

Cartridge 100 ℃ (212 °F) ;

Disposable 180 ℃ (356 °F)

Package

Dry;Prewet by UPW

Flow Rate VS. Differential Pressure Performance

Dimensions

Ordering Information

WFC

Removal Ratings

Diameter

End Cap

Length

O-ring

Metal Cleanliness

Package

E (10nm)

A (20nm)

C (30nm)

G (50nm)

B (0.1μm)

J (0.2μm)

SX (φ68mm, 0.9m2 )

MX(φ81mm, 1.8m2 )

MY(φ81mm, 2.2m2 )

MZ(φ81mm, 2.8m2 )

N(222 Plat)

K(222 Plat with Lock-key)

04 (4”)

10 (10”)

20 (20”)

T (TEV)

K (FFKM)

U(<3ug/device)

Q(<10ug/device)

R(<25ug/device)

E(Electronic)

D (Dry)

W (UPW Prewet)

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