Wet-Vast Series-PTFE Pleated Filter Cartridge with HDPE Cage for SEMI Wet Process

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Description

Membrane Solutions Wet-Vast series filter is a combination of PTFE Membrane and HDPE support/core/cage. PTFE and HDPE materials possess good chemical compatibility which make it suitable for large range of liquid chemical application. It effectively removes particles from high purity chemicals in SEMI industry. Available in a wide range of retention ratings and pore sizes to meet customer’s requirements.

Features

  • Wet Etch and Clean

  • Suitable for a wide range of chemicals

  • High flow rate, low differential pressure and longer service life

  • Pre-wetting option for convenience

  • 100% Integrity tested

Technical Parameters

Materials

Membrane

PTFE

Support, Core and Cage

HDPE

O-ring(222)

EPDM/TEV

Removal Rating

20nm, 30nm, 50nm, 0.1μm, 0.2μm

Membrane Area

SX (φ68mm)

1.2 m2 /10”

MX (φ81mm)

1.8 m2 /10”

MY (φ81mm)

2.2 m2 /10”

MZ (φ81mm)

2.8 m2 /10”

Max. Operating Conditions

Max. Forward Differential Pressure

0.4 MPa (58 psi) @ 25 ℃ (77 °F)

Max. Reverse Differential Pressure

0.3 MPa (43 psi) @ 25 ℃ (77 °F)

Max. Operating Temperature

40 ℃ (104 °F) ;

Package

Dry;Prewet by UPW

Flow Rate VS. Differential Pressure Performance

Dimensions

Ordering Information

WVC

Removal Ratings

Diameter

End Cap

Length

O-ring

Metal Cleanliness

Package

A (20nm)

C (30nm)

G (50nm)

B (0.1μm)

J (0.2μm)

SX (φ68mm, 0.9m2 )

MX(φ81mm, 1.8m2 )

MY(φ81mm, 2.2m2 )

MZ(φ81mm, 2.8m2 )

N(222 Flat)

04 (4”)

10 (10”)

20 (20”)

P (EPDM)

T (TEV)

 

Q(<10ug/device)

R(<25ug/device)

E(Electronic)

D (Dry)

W (UPW Prewet)

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