Wet-Vast Series-PTFE Pleated Filter Cartridge with HDPE Cage for SEMI Wet Process
Request a QuoteDescription
Membrane Solutions Wet-Vast series filter is a combination of PTFE Membrane and HDPE support/core/cage. PTFE and HDPE materials possess good chemical compatibility which make it suitable for large range of liquid chemical application. It effectively removes particles from high purity chemicals in SEMI industry. Available in a wide range of retention ratings and pore sizes to meet customer’s requirements.
Features
-
Wet Etch and Clean
-
Suitable for a wide range of chemicals
-
High flow rate, low differential pressure and longer service life
-
Pre-wetting option for convenience
-
100% Integrity tested
Technical Parameters
|
Materials |
Membrane |
PTFE |
|
Support, Core and Cage |
HDPE |
|
|
O-ring（222） |
EPDM/TEV |
|
|
Removal Rating |
20nm, 30nm, 50nm, 0.1μm, 0.2μm |
|
|
Membrane Area |
SX (φ68mm) |
1.2 m2 /10” |
|
MX (φ81mm) |
1.8 m2 /10” |
|
|
MY (φ81mm) |
2.2 m2 /10” |
|
|
MZ (φ81mm) |
2.8 m2 /10” |
|
|
Max. Operating Conditions |
Max. Forward Differential Pressure |
0.4 MPa (58 psi) @ 25 ℃ (77 °F) |
|
Max. Reverse Differential Pressure |
0.3 MPa (43 psi) @ 25 ℃ (77 °F) |
|
|
Max. Operating Temperature |
40 ℃ (104 °F) ； |
|
|
Package |
Dry；Prewet by UPW |
|
Flow Rate VS. Differential Pressure Performance
Dimensions
Ordering Information
|
WVC |
Removal Ratings |
Diameter |
End Cap |
Length |
O-ring |
Metal Cleanliness |
Package |
|
A (20nm) C (30nm) G (50nm) B (0.1μm) J (0.2μm) |
SX (φ68mm, 0.9m2 ) MX(φ81mm, 1.8m2 ) MY(φ81mm, 2.2m2 ) MZ(φ81mm, 2.8m2 ) |
N(222 Flat) |
04 (4”) 10 (10”) 20 (20”) |
P (EPDM) T (TEV) |
Q（＜10ug/device） R（＜25ug/device） E（Electronic） |
D (Dry) W (UPW Prewet) |
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